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Materials & Process Integration for MEMS - Microsystems Francis E H Tay 2002 edition
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Materials & Process Integration for MEMS - Microsystems
Francis E H Tay
Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.
299 pages, biography
| Medien | Bücher Gebundenes Buch (Buch mit hartem Rücken und steifem Einband) |
| Erscheinungsdatum | 31. August 2002 |
| ISBN13 | 9781402071751 |
| Verlag | Springer-Verlag New York Inc. |
| Seitenanzahl | 299 |
| Maße | 155 × 235 × 19 mm · 712 g |
| Sprache | Englisch |
| Redakteur | Tay, Francis E. H. |
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