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Materials & Process Integration for MEMS - Microsystems Francis E H Tay Softcover reprint of hardcover 1st ed. 2002 edition
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Materials & Process Integration for MEMS - Microsystems
Francis E H Tay
Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.
328 pages, 176 black & white illustrations, biography
| Medien | Bücher Taschenbuch (Buch mit Softcover und geklebtem Rücken) |
| Erscheinungsdatum | 3. Dezember 2010 |
| ISBN13 | 9781441953032 |
| Verlag | Springer-Verlag New York Inc. |
| Seitenanzahl | 299 |
| Maße | 155 × 235 × 17 mm · 458 g |
| Sprache | Englisch |
| Redakteur | Tay, Francis E. H. |
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