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Semiconductor Lithography: Principles, Practices, and Materials - Microdevices Wayne M. Moreau Softcover reprint of the original 1st ed. 1988 edition
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Semiconductor Lithography: Principles, Practices, and Materials - Microdevices
Wayne M. Moreau
In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography.
952 pages, black & white illustrations
| Medien | Bücher Taschenbuch (Buch mit Softcover und geklebtem Rücken) |
| Erscheinungsdatum | 22. Februar 2012 |
| ISBN13 | 9781461282280 |
| Verlag | Springer-Verlag New York Inc. |
| Seitenanzahl | 952 |
| Maße | 170 × 244 × 48 mm · 1,48 kg |
| Sprache | Englisch |
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