Microbiochips Monolithically Integrated with Microfluidics, Micromechanics, Photonics & Electronics by 3D Femtosecond Laser Direct Writing

Provides an overview of 3D femtosecond laser direct writing technology. This book highlight its potential for fabrication of complex smart microsystems by furnishing some examples of fabrication and hybrid integration of microfluidics, micromechanics, photonics, and electronics.