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Silicon Anodization as a Structuring Technique Ivanov 1st ed. 2018 edition
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Silicon Anodization as a Structuring Technique
Ivanov
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
316 pages, 3 Tables, color; 3 Illustrations, color; 138 Illustrations, black and white; XXIX, 316 p.
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